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Al2O3 - Control of the Surface Quality (for EPI-polished surface only) |
We currently guarantee surface roughness Ra < 0.3 nm for our EPI-polished substrates for HB LEDs and SOS applications. Here is an example of AFM image of the EPI-polished surface of 3" C-plane substrate. |
- chemical admixture?s concentrations, - optical transmittance, - rocking curves |