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Al2O3

SOS (Epitaxially grown Silicon on R-plane Sapphire) structures
3'' amd 4'' SOS structures
Specs:
Diameter 2?-4?
Thickness 0.33 ? 0.46 mm
Substrate Orientation R-plane
Surface quality EPI-polished (Ra<0.3 nm) suitable for epitaxial growth
Si-layer Orientation (100)
Si-layer Thickness 0.5-5+/-8% or 0.1-1+/-8% um
Conductivity Type p-type, i-type or n-type
Specific resistivity 1-200 Ohm*cm or 10-30 Ohm*cm

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